WOLL.SEMICON
Precision in wet chemistry

WOLL.Semicon is the semiconductor brand of M-O-T Mikro- und Oberflächentechnik GmbH within the WOLL.Group. We develop custom wet process systems for research, development and volume production. At our Saarbrücken site, we develop and manufacture modular and technologically advanced systems that integrate seamlessly into existing Front-End-of-Line (FEOL) and Back-End-of-Line (BEOL) manufacturing environments.

Our systems support complex wet-chemical processes such as etching, cleaning, electroplating, and photoresist processing. They meet the stringent requirements of advanced applications in photonics, energy, 5G, microLED, sensors, and MEMS. Ultra-high-purity wet bench systems, precise process control, and robust components ensure stable process performance, high efficiency, and low operating costs.

We offer manual, semi- and fully automated wet process systems as well as custom chemical stations with broad material compatibility. Materials processed include Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN), Gallium Arsenide (GaAs) and Indium Phosphide (InP) for wafer sizes up to 300 mm. Additionally, our platforms enable the electroplating deposition of materials such as gold, silver, copper, nickel and other alloys.

Our commitment: tailor-made wet chemistry solutions that ensure the highest process quality and deliver measurable improvements in semiconductor manufacturing performance.