µCDS
Safe chemical supply

In semiconductor manufacturing, the safe handling and controlled provision of process chemicals are essential for stable process windows and high system availability. The μCDS system handles chemical distribution, mixing, and disposal in FEOL and BEOL environments and integrates into existing tool and facility infrastructures via network protocols or hardwired interfaces.

The system is designed for bulk chemical handling and ensures reproducible media supply under controlled process conditions. Mixing and distribution processes are continuously monitored, while the modular system architecture enables flexible adaptation to different chemicals, consumption rates, and process layouts.

The system includes drum connection stations with integrated safety monitoring, leakage and exhaust air monitoring, fill level detection, and visual and acoustic alarm systems. Its compact and maintenance-friendly design enables integration into cleanroom and subfab environments close to production.

From media design and interface definition through to commissioning, our engineering team supports integration with a focus on process stability, media purity, and stable long-term operating conditions.